Nanoindentation Induced Elastic-plastic Deformation of GaN Nanomembrane on a Sapphire Substrate
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Mechanical Deformation Induced in Si and GaN Under Berkovich Nanoindentation
Details of Berkovich nanoindentation-induced mechanical deformation mechanisms of single-crystal Si(100) and the metal-organic chemical-vapor deposition (MOCVD) derived GaN thin films have been systematic investigated by means of micro-Raman spectroscopy and cross-sectional transmission electron microscopy (XTEM) techniques. The XTEM samples were prepared by using focused ion beam (FIB) milling...
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ژورنال
عنوان ژورنال: American Journal of Nanosciences
سال: 2021
ISSN: 2575-484X
DOI: 10.11648/j.ajn.20210701.13